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Why is edge bead more common in thick SU-8 compared to thin Shipley 1827? How can...

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Mechanical Engineering

Why is edge bead more common in thick SU-8 compared to thinShipley 1827? How can we minimize the edge bead problem (describeall possible methods)? What kind of issues does edge bead producein soft bake and exposure?

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4.3 Ratings (630 Votes)
Edge bead removal methods The first method was to spin the wafer very slowly to spread the SU8 out However using this method created several uncovered areas around the edge The second method attempted to remove the bead with acetone    See Answer
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