Q1.An n-type silicon wafer undergoes a pre-deposition diffusion process with a constant surface concentration of boride...

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Q1.An n-type silicon wafer undergoes a pre-deposition diffusionprocess with a constant surface concentration of boride gas; theresulting concentration of boron in silicon at the surface isestimated to be 1x10^18 atoms cm-3 . The background concentrationof trace boron atoms in the silicon wafer is estimated to be1x10^14 cm-3 .(A) Estimate the depth of the p-n junction below thesurface when the background doping concentration of the n-typeimpurity is 3.45 x10^16 cm-3 ; assume the diffusion processproceeds for 10 minutes and has a diffusion parameter given by10-12 cm2 s -1 .

(B) Estimate the number of boron atoms (per cm2 ) introduced inthis thin surface layer following the predeposition step.

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