Provide a short description, for each of the subject, of no more than a paragraph and...

70.2K

Verified Solution

Question

Electrical Engineering

Provide a short description, for each of the subject, of no morethan a paragraph and one representative figure.
a) Working principles of micro-sensors (chemical, optical,acoustic wave, pressure and thermal)
b) Working principles of micro-actuators (thermal forces,shape-memory alloys, piezoelectric and electrostatic)
c) Materials selection for micro-sensors/actuators (e.g.,substrates and wafers, silicon compounds such as dioxide, carbide,nitride, and polycrystalline, silicon piezoelectric, galliumarsenide, piezoelectric crystals, polymers and films)
d) Micro-sensors/actuators fabrication processes (e.g.,photolithography, oxidation, chemical vapor deposition, chemicaland plasma etching, bulk micromanufacturing, surfacemicromanufacturing and LIGA process)

Answer & Explanation Solved by verified expert

4.1 Ratings (706 Votes)

Working principle of micro sensors These sensorswork on the principle of interactionsbetween the biomolecules in the sample and the analyte usually insolution in the sensor Signal transduction isthe changing of the physical properties of See Answer

Get Answers to Unlimited Questions

Join us to gain access to millions of questions and expert answers. Enjoy exclusive benefits tailored just for you!

Membership Benefits:

Unlimited Question Access with detailed Answers
Zin AI - 3 Million Words
10 Dall-E 3 Images
20 Plot Generations
Conversation with Dialogue Memory
No Ads, Ever!
Access to Our Best AI Platform: Flex AI - Your personal assistant for all your inquiries!

Become a Member