Provide a short description, for each of the subject, of no morethan a paragraph and one representative figure.
a) Working principles of micro-sensors (chemical, optical,acoustic wave, pressure and thermal)
b) Working principles of micro-actuators (thermal forces,shape-memory alloys, piezoelectric and electrostatic)
c) Materials selection for micro-sensors/actuators (e.g.,substrates and wafers, silicon compounds such as dioxide, carbide,nitride, and polycrystalline, silicon piezoelectric, galliumarsenide, piezoelectric crystals, polymers and films)
d) Micro-sensors/actuators fabrication processes (e.g.,photolithography, oxidation, chemical vapor deposition, chemicaland plasma etching, bulk micromanufacturing, surfacemicromanufacturing and LIGA process)
