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Provide a description of the materials selection for the following micro-sensors/actuators: 1.) substrates and wafers 2.) silicon compounds...

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Mechanical Engineering

Provide a description of the materials selection for thefollowing micro-sensors/actuators:

1.) substrates and wafers

2.) silicon compounds such as dioxide, carbide, nitride, andpolycrystalline

3.) silicon piezoelectric

4.) gallium arsenide

5.) piezoelectric crystals

6.) polymers

7.) films

Answer & Explanation Solved by verified expert
3.6 Ratings (408 Votes)
Ans1 Silicon is most commonly material used as a substrate Properties of silicon as a substrate are as follows Mechanically stable High melting point 1400 C Ideal structural material with young modulus close to steel and light weight as a compared to Aluminium Wafers material can be silicon or single crystalline material like quartz and gallium arsenide Ans2 Silicon oxide in microsystems 1 Acts as a    See Answer
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