Provide a description of the following micro-sensors/actuators
fabrication processes:
1.) photolithography
2.) oxidation
3.) chemical vapor deposition
4.) chemical and...
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Mechanical Engineering
Provide a description of the following micro-sensors/actuatorsfabrication processes:
1.) photolithography
2.) oxidation
3.) chemical vapor deposition
4.) chemical and plasma etching
5.) bulk micromanufacturing
6.) surface micromanufacturing
7.) LIGA process
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