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Provide a description of the following micro-sensors/actuators fabrication processes: 1.) photolithography 2.) oxidation 3.) chemical vapor deposition 4.) chemical and...

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Mechanical Engineering

Provide a description of the following micro-sensors/actuatorsfabrication processes:

1.) photolithography

2.) oxidation

3.) chemical vapor deposition

4.) chemical and plasma etching

5.) bulk micromanufacturing

6.) surface micromanufacturing

7.) LIGA process

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