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Investigate the use of electron beam lithography to make small structures. Find an example in the...

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Physics

Investigate the use of electron beam lithography to make smallstructures. Find an example in the literature. Explain itsadvantages and limitations.

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Electronbeam lithography is the act of developing shapes on a surface covered with an electronsensitive film called a resist The electron beam changes the solubility of the resist enabling selective removal of either the exposed or nonexposed    See Answer
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