I designed a substrate holder for a thermal evaporator for a lab I work in, based...

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Mechanical Engineering

I designed a substrate holder for a thermal evaporator for a labI work in, based on the size of our chamber. It is heightadjustable (rod stopping height from falling) with 2 or 3 mmtolerances.
The boat will be very close to tungsten boats as they areheating up. My question is...
what materials should I consider using for this design? And whattemperatures can these materials go up to without oxidationoccuring? What temperatures can they go up to without melting orsignificantly deforming?

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4.5 Ratings (845 Votes)

To make the substrate holder, I would suggest ceramic materials.

To be more precise, let me give you some examples of the toghest materials around. Tantalum and Hafnium carbides are available which can withstand around 4000 degree Celsius without oxidation. These are costly and can't come in handy pretty easily. They are both refractory ceramics

So, to take it easy, I would suggest Nickel based alloys that are used to coat turbine blades that can withstand around 2000 degrees. Also, there are Ni based alloys or Molybdenum based alloys combined with Silicon or Boron to imprpove their temp withstanding capacity.

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