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Draw a layout for Micro-Electro Mechanical Systems (MEMS) pressure sensore. For each layer, indicate it using...

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Electrical Engineering

Draw a layout for Micro-Electro Mechanical Systems (MEMS)pressure sensore. For each layer, indicate it using a differentcolor. Also, mention the dimensions.

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3.9 Ratings (542 Votes)
The nanowire pressure sensor hasbeen fabricated using the INTELLIFAB module The sequence of stepsin the fabrication process is described in the process table shownin fig 1 To increase the sensitivity of the pressure sensoradouble nanowire pressure sensor is designed in such a way that itreplaces the conventional piezoresistor of the piezoresistivepressure sensor The nanowire assembly forms a connecting bridgebetween the diaphragm and the pressure sensor The nanowirepressure sensor diaphragm has been fabricated with circulardiaphragm The sequence of steps that are adopted to fabricate thenanowire piezoresistive pressure sensor are tabulated in Fig 1The design of the MEMS nanowirepiezoresistive pressure sensor starts from drawing the mask layoutof different layers involved in the fabrication process by usingIntellimask module Intellimask has been specially designed forconstructing and editing MEMS device level masksThe layout has anarea of about 1400m X 1400m The mask is used to bulk etch thewafer from the bottom to create a diaphragm structure and nanowireassembly The actual area of the diaphragm after fabrication isabout 1000m X    See Answer
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