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Diffusion is a key element of integrated circuit fabrication. Describe the two basic heat treatments that...

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Physics

Diffusion is a key element of integrated circuit fabrication.Describe the two basic heat treatments that are used to diffuseimpurities into silicon during this fabrication process.

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4.1 Ratings (499 Votes)
ipredepositionIn the predeposition step impurity atoms are diffused into the silicon often from a phase the partial pressure of which is maintained constant Thus the surface composition of the    See Answer
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