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Basic Semiconductor Process Lab Fabrication 9. How do you adjust the spin speed and spin time...

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Electrical Engineering

Basic Semiconductor Process Lab Fabrication

9. How do you adjust the spin speed and spin time if you foundthat the PR solution is thick(not flowing freely)?

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3.8 Ratings (711 Votes)
Thinckness t Speed w t is inversely proportional to square root of w tc 1sqrtw c proportionality constant Spin speed The range of spin speeds available is important as it defines the range of thicknesses that can be achieved from a given solution In general spin coating can produce uniform films relatively easily from about 1000 rpm    See Answer
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