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  3. 1. what is the difference between lpcvd and pecvd?

1. What is the difference between LPCVD and PECVD? (Note: Saying “The letter E.” is not...

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Electrical Engineering

1. What is the difference between LPCVD and PECVD? (Note: Saying“The letter E.” is not a sufficient answer.)

1. Explain why chemical mechanical polished (CMP) is essentialfor making integrated circuits that have hundreds of millions oftransistors.

3. Why must an ion implant be followed by a high-temperatureannealing step? And what is the down-side of having to do thisfollow-up anneal??

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